Document Type: Original Research Paper

Authors

1 Department of Electrical Engineering, Beyza Branch, Islamic Azad University, Beyza, Iran.

2 Department of Electrical Engineering, Firouzabad Institute of Higher Education, Firouzabad, Iran.

Abstract

Background and Objectives: Coriolis vibratory gyroscope is one of the most modern types of gyroscopes that has been substituted for the common gyroscopes with some differences in the test mass design and elastic suspension. According to the important features observed in the capacitive excitation of the actuators regarding the piezoelectric actuators, the operation principles and their formulations are completely changed, which require both two dimensional and finite element analysis to evaluate their optimal performance. Because the sensors are usually vibrating continuously while operation.
Methods: In this paper a general framework is presented that fully describes the influence of the parameters related to different frequency operating modes. The main idea of the vibration gyroscope is to replace the rotational rotor with a vibrational structure to utilize the effects of Coriolis force, which causes the secondary motion of a sensitive mass to match an angular velocity.
Results: In this paper, the sensitivity analysis and performance evaluation of a hemispherical vibrational gyroscope are discussed. The frequency split phenomenon, the sensed voltage around the resonance frequency and Young's modulus variation are also investigated.
Conclusion: Finally, the results of the simulated resonance frequencies are compared and validated with the mathematical and theoretical principles.

Keywords

Main Subjects

[1] M. Ghaderi, V. Tabataba Vakili, M. Sheikhan, “STCS-GAF: spatio-temporal compressive sensing in wireless sensor networks- A GAF-based approach,” Journal of Electrical and Computer Engineering Innovations, 6(2): 153-166, 2018.

[2] S.  Ranjbaran,  A.  Roudbari,  S.  Ebadollahi,  “A  simple  and  fast method for field calibration of triaxial gyroscope by using accelerometer,” Journal of Electrical and Computer Engineering Innovations, 6(1): 1-6, 2018.

[3] S. Shams Shamsabad Farahani, “Congestion control approaches applied to wireless sensor networks: A survey,” Journal of Electrical and Computer Engineering Innovations, 6(2): 125-144, 2018.

[4] P. Halvaee, M. Beigi, “Room temperature methanol sensor based on ferrite cobalt (cofe2o4) porous nanoparticles,” Journal of Electrical and Computer Engineering Innovations, 6(2): 209-216, 2018.

[5] M. Shaveisi, A. Rezaei, “Performance analysis of reversible sequential circuits based on carbon nanotube field effect transistors (CNTFETs),” Journal of Electrical and Computer Engineering Innovations, 6(2): 167-178, 2018.

[6] Z. C. Feng, K. Gore, “Dynamic characteristics of vibratory gyroscopes,” IEEE Sensors Journal, 4(1): 80-84, 2004.

[7] G. He, Z. Geng, “Dynamics and robust control of an under-actuated torsional vibratory gyroscope actuated by electrostatic actuator,” IEEE/ASME Transactions on Mechatronics, 20(4): 1725-1733, 2015.

[8] Y. Dong, M. Kraft, W. Redman-White, “Micro-machined vibratory gyroscopes controlled by a high-order band-pass sigma-delta modulator,” IEEE Sensors Journal, 7(1): 59-69, 2007.

[9] S. A. Zotov, A. A. Trusov, A. M. Shkel, “Three-dimensional spherical shell resonator gyroscope fabricated using wafer-scale glassblowing,” Journal of Micro Electromechanical Systems, 21(3): 509-510, 2012.

[10] E. Tatar, T. Mukherjee, G. K. Fedder, “Stress effects and compensation of bias drift in a mems vibratory-rate gyroscope,” Journal of Micro Electromechanical Systems, 26(3): 569-579, 2017.

[11] J. Fei, “Robust adaptive vibration tracking control for a micro-electro-mechanical systems vibratory gyroscope with bound estimation,” IET Control Theory & Applications, 4(6): 1019-1026, 2010.

[12] Y. Lu, X. Wu, W. Zhang, W. Chen, F. Cui, W. Liu, “Optimal special vibration used as reference vibration of vibratory gyroscopes,” Electronics Letters, 46(2): 155-156, 2010.

[13] S. Sung, W. Sung, C. Kim, S. Yun, Y. J. Lee, “On the mode-matched control of mems vibratory gyroscope via phase-domain analysis and design,” IEEE/ASME Transactions on Mechatronics, 14(4): 446-455, 2009.

[14] P. Lynch, “In retrospect replication of Foucault’s pendulum experiment in Dublin,”.

[15] W. H. Quick, “Theory of the vibrating string as an angular motion sensor,” Journal of Applied Mechanics, 31(3): 523-534, 1964.

[16] T. Tognola, “Magneto-electric motion detecting transducer,” U.S. Patentb 3,129,347. 14,. 1964.

[17] J. Cui, Z. Guo, Q. Zhao, Z. Yang, Y. Hao, G. Yan, “Force rebalance controller synthesis for a micro-machined vibratory gyroscope based on sensitivity margin specifications,” Journal of Micro-Electromechanical Systems, 20(6): 1382-1394,. 2011.

[18] E. Song, S. Kang, H. Kim, Y. Kim, J. An, C. Baek, “Wafer-level fabrication of a fused-quartz double-ended tuning fork resonator oscillator using quartz-on-quartz direct bonding,” IEEE Electron Device Letters, 34(5): 692-694, 2013.

[19] M. F. Zaman, A. Sharma, Z. Hao, F. Ayazi, "A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour Allan deviation bias instability,” Journal of Micro-
Electromechanical Systems, 17(6): 1526-1536, 2008
.

[20] S. A. Zotov, B. R. Simon, I. P. Prikhodko, A. A. Trusov, A. M. Shkel, “Quality factor maximization through dynamic balancing of tuning fork resonator,” IEEE Sensors Journal, 14(8): 2706-2714, 2014.

[21] D. R. Myers, R. G. Azevedo, L. Chen, M. Mehregany, A. P. Pisano, “Passive substrate temperature compensation of doubly anchored double-ended tuning forks,” Journal of Micro-Electromechanical Systems, 21(6): 1321-1328, 2012.

[22] K. W. Leung, C. K. Leung, “Wideband dielectric resonator antenna excited by cavity-backed circular aperture with microstrip tuning fork,” Electronics Letters, 39(14): 1033-1035, 2003.

[23] C. Yang, H. Li, “Digital control system for the mems tuning fork gyroscope based on synchronous integral demodulator,” IEEE Sensors Journal, 15(10): 5755-5764, 2015.

[24] P. Shao, C. L. Mayberry, X. Gao, V. Tavassoli, F. Ayazi, “A poly-silicon micro-hemispherical resonating gyroscope,” Journal of Micro-Electromechanical Systems, 23(4): 762-764, 2014.

[25] J. W. Song, H. Song, Y. J. Lee, C. G. Park, S. Sung, “Design of oscillation control loop with coarse-precision mode transition for solid-state resonant gyroscope,” IEEE Sensors Journal, 16(6): 1730-1742, 2016.

[26] C. Dai, D. Pi, Z. Fang, H. Peng, “A novel long-term prediction model for hemispherical resonator gyroscope's drift data,” IEEE Sensors Journal, 14(6): 1886-1897, 2014.

[27] A. Darvishian, B. Shiari, J. Y. Cho, T. Nagourney, K. Najafi, “Anchor loss in hemispherical shell resonators,” Journal of Micro-Electromechanical Systems, 26(1): 51-66, 2017.

[28] Z. Liu, W. Zhang, F. Cui, J. Tang, Y. Zhang, “Fabrication and characterization of micro-scale hemispherical shell resonator with diamond electrodes on the Si substrate,” Micro & Nano Letters, 14(6): 674-677, 2019.